HIGH RESOLUTION IMAGING OF BORON DISTRIBUTION ON DIAMOND FILM USING ENERGY FILTERED TEM

Authors

  • A. Dimyati Center for Advanced Material Science and Technology (BATAN)
  • S. Purwanto Center for Advanced Material Science and Technology (BATAN)
  • R. Iskandar RWTH Aachen

DOI:

https://doi.org/10.22441/ijimeam.v2i1.18951

Keywords:

boron doped diamond film, CVD, ESI, EFTEM

Abstract

The main difficulty in investigation of thin film systems is the lack of capability to get detail information of the material in nano level due to the low resolution of conventional imaging techniques such as SEM, SIMS etc. In this work Electron Spectroscopy Imaging (ESI) in energy filtered transmission electron microscope (EFTEM) was used to produce a real image of boron distribution in a diamond film deposited on (111) Si by chemical vapor deposition. The result revealed the layer consists of 1.3 μm thick diamond structured carbon film adjacent to Si substrate and 120 nm amorph carbon layer on top most surface. Boron atoms were distributed uniformly in both layer, however slight higher concentration in the second layer is observed. There was obviously no grain boundary enrichment of Boron atoms observed.

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References

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Published

2016-08-10

How to Cite

1.
Dimyati A, Purwanto S, Iskandar R. HIGH RESOLUTION IMAGING OF BORON DISTRIBUTION ON DIAMOND FILM USING ENERGY FILTERED TEM. Int. J. Innov. Mech. Eng. Adv. Mater [Internet]. 2016 Aug. 10 [cited 2026 Jun. 3];2(1):16-9. Available from: https://publikasi.mercubuana.ac.id/index.php/ijimeam/article/view/18951

Issue

Vol. 2 No. 1 (2016)

Section

Articles

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